Laboratory-based reflectometer using line spectra of an RF-induced gas-discharge lamp in 30- to 200-nm wavelength range

A laboratory-based reflectometer designed for characterizing the reflectivity of optical coatings in 30- to 200-nm wavelength range was recently developed at IPOE. An RF-produced gas-discharge light source is applied generate characteristic lines. The mounted on a grazing incident monochromator with 146-deg deviation angle between and diffracted arms. By precisely adjusting toroidal grating inside chamber, monochromatic lights are acquired through exit slit. collimator mirror two sets collimation slits 2 mm × dimension utilized reducing divergence beam sample. high-precision six-axis translation stage, which allows heavy sample maximum diameter 100 mm, used control positions samples detector. chopper disk both intensity monitor signal modulation placed an incidence 70 deg relative beam. configuration, adjustment process, test results presented detail. experimental Al / LiF MgF2 film obtained from our laboratory BESSY-II Synchrotron as well Hefei Light Source given compared demonstrating reliability system.